Norma UPS able to produce Ultra Clean Vacuum

Norma UPS will soon receive UCV certification from ASML. This means that Norma will then be one of the eight Dutch companies that have this qualification.

ASML and TNO carried out two audits to assess whether Norma is qualified to produce Ultra Clean Vacuum components. These UCV components are intended for the latest generation machine for ASML, the NXE machine, based on EUV (Extreme Ultra Violet). During the final audit in June, the auditors from TNO and ASML indicated that their recommendation to ASML would be positive. This means that Norma UPS is able to make UCV products.

This competence is an extended development of our existing knowledge for the production of Ultra High Vacuum parts for, among other things, electron microscopes of FEI Company.

Clean parts
Rest gas analyses (RGA) were carried out to determine whether the products are 100% clean. The results of the RGA reports demonstrate that our parts are clean enough to meet the requirements for functioning in Ultra High Vacuum environments.

We have equipped our production process and the supply chain to produce according to UCV guidelines. Now that we are expecting the certificate soon, we will continue to develop UCV and UHV technology. In addition, we are looking for possibilities to assemble complex UCV modules in a controllable manner.

The UCV certificate, which ASML had not yet awarded to a Dutch company, means that Norma UPS can now also be your strategic partner for other applications in a UCV and UHV environment.


14 October 2009